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Plasma Etch Fundamentals
Summary of this site.
Plasmas
Plasma etch chemistries and process.
Plasma Physics
OES - Optical emission spectra
Introduction to etch chambers
Examples of etch processes
Strike and BT steps
Poly silicon and Si etching
Dielectric etching
Metal etch
Gate and bit-line etch.
Hard mask open and trims
Pillar etch
Planarisation Etch
HAR contact for DRAM
low-k etching.
Atomic Layer etching
III-V, compound and SiC etch
Bosch etch
TSV etch
MEMs etching
Bevel edge etch
Recipe Development SEMs
Chambers and hardware
Ideal etch chambers
Real etch chambers
Plasma etch sources
RF power in plasma processing
RF matching concepts
RF Harmonics
ESC - electrostatic chucks
Edge Rings
Transfer module
Day to day running
Recovery and Seasoning
Manufacturing with plasma etch
Links
Acknowledgements
Contact me
More
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