top of page
HAR container etch for DRAM.
HAR is required for DRAM capacitor container etch and deep contact etch. AR can be nearly 100:1. high power DRIE tools are used.
 |  |  |
|---|
bottom of page
HAR is required for DRAM capacitor container etch and deep contact etch. AR can be nearly 100:1. high power DRIE tools are used.
| | |
|---|