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Metal etch
With many memory and Logic applications Al etch has almost been replaced by Damascene processes. However there is still W, TiN, HfO, Cd, Co and Cr etching on ICP tools.
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With many memory and Logic applications Al etch has almost been replaced by Damascene processes. However there is still W, TiN, HfO, Cd, Co and Cr etching on ICP tools.
|
|---|