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Bosch etch.
Bosch etch is a rapid etch / dep / etch process used in TSV and MEMS. It is characterised by the large scalpels on the sidewall. E/R > 1um/min are possible.
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Bosch etch is a rapid etch / dep / etch process used in TSV and MEMS. It is characterised by the large scalpels on the sidewall. E/R > 1um/min are possible.
| | |
|---|---|---|
| | |